Memory cell, array, device and system with overlapping buried digit line and active area and method for forming same

ABSTRACT

A memory cell, array and device include an active area formed in the substrate with a vertical transistor including a first end disposed over a first portion of the active area. The vertical transistor is formed as an epitaxial post on the substrate surface, extends from the surface of the substrate, and includes a gate formed around a perimeter of the epitaxial post. A capacitor is formed on the vertical transistor and a buried digit line vertically couples to a second portion of the active area. An electronic system and method for forming a memory cell are also disclosed.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates in general to memory circuits and, moreparticularly, to dynamic random access memory cells and a method forforming the same.

2. State of the Art

Random access memory (“RAM”) cell densities have increased dramaticallywith each generation of new designs and have served as one of theprincipal technology drivers for ultra large scale integration (“ULSI”)in integrated circuit (“IC”) manufacturing. However, in order toaccommodate continuing consumer demand for integrated circuits thatperform the same or additional functions and yet have a reduced size ascompared with available circuits, circuit designers continually searchfor ways to reduce the physical size of the memory arrays within thesecircuits without sacrificing array performance.

With respect to memory ICs, the area required for each memory cell in amemory array partially determines the capacity of a memory IC. This areais a function of the number of elements in each memory cell and the sizeof each of the elements. For example, FIG. 1 illustrates an array 100 ofmemory cells 110 for a conventional dynamic random access memory (DRAM)device. Memory cells 110 are typically formed in adjacent pairs, whereeach pair is formed in a common active area 120 and share a commonsource/drain region that is connected to a respective digit line via adigit line contact 124. The area of the memory cells 110 is said to be8F², where F represents a minimum feature size forphotolithographically-defined features. For conventional 8F² memorycells, the dimension of the cell area is 2F×4F. The dimensions of aconventional 8F² memory cell are measured along a first axis from thecenter of a shared digit line contact 124 (1/2F), across a word line 128that represents an access transistor (1F), a storage capacitor 132 (1F),an adjacent word line 136 (1F), and half of an isolation region 140(1/2F) separating the active area 120 of an adjacent pair of memorycells (i.e., resulting in a total of 4F). The dimensions along a secondperpendicular axis are half of an isolation region 150 on one side ofthe active area 120 (1/2F), the digit line contact 124 (1F), and half ofanother isolation region 154 on the other side of the active area 120(1/2F) (i.e., resulting in a total of 2F).

In some state-of-the-art memory devices, the memory cells for megabitDRAM have cell areas approaching 6F². Although this is approximately a25% improvement in memory cell area relative to conventional 8F² memorycells, as previously described, a further reduction in memory cell sizeis still desirable. Therefore, there is a need for a still more compactmemory cell structure and method for forming the same.

BRIEF SUMMARY OF THE INVENTION

The present invention is directed to a memory cell, array, device andsystem with an overlapping buried digit line and active area and methodfor forming the same. In one embodiment of the present invention, a DRAMcell is formed on a surface of a semiconductor substrate. The DRAM cellincludes an active area formed in the substrate with a verticallyoriented access transistor which includes a first end disposed over afirst portion of the active area. The DRAM cell further includes acapacitor formed and electrically coupled to a second end of the accesstransistor. A buried digit line electrically couples using a verticallyoriented contact to a second portion of the active area.

In another embodiment of the present invention, a memory cell formed ona substrate is provided. The memory cell includes an active area formedin the substrate with a vertical transistor including a first enddisposed over a first portion of the active area. The verticaltransistor is formed as an epitaxial post on the substrate surface andextends from the surface of the substrate. The vertical transistorincludes a gate formed around a perimeter of the epitaxial post. Acapacitor is formed on the vertical transistor and a buried digit linevertically couples to a second portion of the active area.

In yet another embodiment of the present invention, a memory arrayformed on a substrate is provided. The memory array includes at leastone active area formed in the substrate and a plurality of memory cellsformed in the at least one active area. Each of the plurality of memorycells includes a vertically oriented access transistor including a firstend disposed over a first portion of the active area, a capacitor formedon and electrically coupled to a second end of the vertically orientedaccess transistor and a buried digit line electrically coupled in avertically oriented contact to a second portion of the active area.

In a further embodiment of the present invention, a memory device isprovided having an array of memory cells with row and column addresscircuitry coupled thereto with each of the memory cells of the deviceincluding an active area formed in the substrate with a verticallyoriented access transistor disposed over a first portion of the activearea. Each memory cell further includes a capacitor formed on andelectrically coupled to a second end of the vertically oriented accesstransistor with a buried digit line electrically coupled in a verticallyoriented contact to a second portion of the active area.

In yet a further embodiment of the present invention, an electronicsystem including a processor, an input device, an output device and amemory device coupled to the processor is provided. The memory deviceincludes a memory array formed on a substrate including at least oneactive area having a plurality of memory cells formed in the at leastone active area. At least one of the memory cells includes a verticallyoriented access transistor including a first end disposed over a firstportion of the active area with a capacitor formed on and electricallycoupled to a second end of the vertically oriented access transistor.The memory cell further includes a buried digit line electricallycoupled with a vertically oriented contact to a second portion of theactive area.

In an additional embodiment of the present invention, a method isprovided for forming a memory cell on a surface of a substrate. At leastone active area is formed in the substrate and a vertically orientedaccess transistor is formed with a first end disposed over a firstportion of the active area. A buried digit line is formed toelectrically couple in a vertically oriented arrangement with a secondportion of the active area. A capacitor is formed on a second end of thevertically oriented access transistor.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

In the drawings, which illustrate what is currently considered to be thebest mode for carrying out the invention:

FIG. 1 is a simplified top plan view of conventional memory cells;

FIG. 2A is a simplified top plan view of memory cells according to anembodiment of the present invention, and FIG. 2B is a simplifiedcross-sectional view of a pair of memory cells according to theembodiment shown in FIG. 2A;

FIG. 3 is a simplified cross-sectional view of a semiconductor substratethat can be processed to form the memory cell of FIG. 2, in accordancewith an embodiment of the present invention;

FIG. 4 is a simplified cross-sectional view of the substrate of FIG. 3at a later point in processing, in accordance with an embodiment of thepresent invention;

FIG. 5 is a simplified cross-sectional view of the substrate of FIG. 4at a later point in processing, in accordance with an embodiment of thepresent invention;

FIG. 6 is a simplified cross-sectional view of the substrate of FIG. 5at a later point in processing, in accordance with an embodiment of thepresent invention;

FIG. 7 is a simplified cross-sectional view of the substrate of FIG. 6at a later point in processing, in accordance with an embodiment of thepresent invention;

FIG. 8 is a simplified cross-sectional view of the substrate of FIG. 7at a later point in processing, in accordance with an embodiment of thepresent invention;

FIG. 9 is a simplified cross-sectional view of the structure of FIG. 2Bat a later point in processing, in accordance with an embodiment of thepresent invention;

FIG. 10 is simplified top plan view of memory cells, in accordance withan embodiment of the present invention;

FIG. 11 is a simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 10;

FIG. 12 is another simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 10;

FIG. 13 is simplified top plan view of memory cells, in accordance withan embodiment of the present invention;

FIG. 14 is a simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 13;

FIG. 15 is another simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 13;

FIG. 16 is simplified top plan view of memory cells, in accordance withan embodiment of the present invention;

FIG. 17 is a simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 16;

FIG. 18 is another simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 16;

FIG. 19 is simplified top plan view of memory cells, in accordance withan embodiment of the present invention;

FIG. 20 is a simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 19;

FIG. 21 is another simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 19;

FIG. 22 is simplified top plan view of memory cells, in accordance withan embodiment of the present invention;

FIG. 23 is a simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 22;

FIG. 24 is another simplified cross-sectional view of a memory cell, inaccordance with the embodiment of FIG. 22;

FIG. 25 is a functional block diagram of a memory circuit that includesmemory cells according to an embodiment of the present invention; and

FIG. 26 is a functional block diagram of a computer system including amemory device, according to one or more embodiments of the presentinvention.

As is conventional in the field of integrated circuit representation,the lateral sizes and thicknesses of the various layers are not drawn toscale, and portions of the various layers may have been arbitrarilyenlarged or reduced to improve drawing legibility.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 2A is a top plan view of an array of memory cells 200 according toan embodiment of the present invention. As shown in FIG. 2A, capacitorshave not been illustrated in order to avoid unnecessarily obscuring theother structures of the memory cell 200. The dimensions of the cell 200are 4F². That is, the cell 200 measures 2F along a first axis, startingwith half of a digit line contact (1/2F), and extending over anepitaxial post on which a capacitor is formed (1F) and half of anisolation region (1/2F). Along a second perpendicular axis, the cell 200measures 2F, starting with half of an isolation region (1/2F), andextending over the digit line contact (1F), and half of anotherisolation region (1/2F). FIG. 2B is a simplified cross-sectional view ofthe memory cell 200 (FIG. 2A) along A-A at a stage of processing. A moredetailed description of the memory cell 200 will be provided withrespect to FIGS. 3 through 9, which illustrate the memory cell 200 atvarious stages of processing.

FIG. 3 is a simplified cross-sectional view of the memory cell 200 (FIG.2A) at a stage of processing. Formed, for example, in a p-type substrate204 is an n-type active area 206 in which a pair of memory cells 200 isformed. The active area 206 is isolated from adjacent active areas byisolation regions 202. The active area 206 and the isolation regions 202may be formed using conventional methods, for example, conventionalmasking, deposition, implant and drive-in processes. Following theformation of the isolation regions 202 and the active area 206, a layerof insulating material is deposited onto the substrate 204, masked andetched to form sacrificial structures 208 a-c on the substrate 204. Theinsulating material from which the sacrificial structures 208 a-c areformed may be silicon nitride, or alternatively, as will be explained inmore detail below, other insulating material to which subsequent etchprocesses are selective.

FIG. 4 is a simplified cross-sectional view of the structure shown inFIG. 3 at a later point in processing, in accordance with an embodimentof the present invention. An insulating material is deposited over thesubstrate 204 and the sacrificial structures 208 a-c and subsequentlyetched back using an anisotropic etch process. Suitable etch processesare known in the art. Sidewalls 210 a-c, 212 a-c are formed as a resultof the deposition and etch back processes. The insulating layer can beformed from a silicon-oxide material, and the etch back process shouldbe selective to the silicon nitride of the sacrificial structures 208a-c. A p-type epitaxial layer is formed on the exposed regions of thesubstrate 204, and etched to selectively form epitaxial “posts” 220, 222within the trench region between the sacrificial structures 208 a, 208b, and 208 b, 208 c, respectively. As will be described in more detailbelow, the epitaxial posts 220, 222 represent the material in whichvertical access transistors (i.e., word lines) will be formed and towhich memory cell capacitors are electrically coupled.

FIG. 5 is a simplified cross-sectional view of the structure shown inFIG. 4 at a later point in processing, in accordance with an embodimentof the present invention. An etch process selective to the nitridesacrificial structures 208 a-c and the epitaxial posts 220, 222 isperformed to remove the oxide sidewalls 210 a-c, 212 a-c. Gate oxide 230is then formed over the epitaxial posts 220, 222 and the exposed regionsof the substrate 204. The material of the sacrificial structures 208 a-cis such that oxide does not form thereon during the formation of thegate oxide 230.

FIG. 6 is a simplified cross-sectional view of the structure shown inFIG. 5 at a later point in processing, in accordance with an embodimentof the present invention. A polysilicon layer is formed over thestructure of FIG. 5 followed by a masking and etch process toselectively remove portions of the polysilicon layer. An anisotropicetch back process is then performed to remove additional portions ofpolysilicon layer in order to form gates 240, 242 of access or verticaltransistors 250, 252, respectively. The etch back process recesses thegates 240, 242 to below the height of the epitaxial posts 220, 222,respectively. Although shown in cross section in FIG. 6, the gates 240,242 surround the respective posts 220, 222. This is apparent from FIG.2A, which illustrates that the gate 242 is part of a continuouspolysilicon word line that is formed around each of the epitaxial postsassociated with the memory cells of that row. When activated by therespective word lines, the epitaxial posts as surrounded by therespective gates form a depletion region.

FIG. 7 is a simplified cross-sectional view of the structure shown inFIG. 6 at a later point in processing, in accordance with an embodimentof the present invention. An insulating layer is formed over thestructure shown in FIG. 6 and subsequently etched back to form arelatively planar surface. Although a conventional chemical-mechanicalpolishing process can be used for the etch back step, it will beappreciated that other suitable etch back processes may be used as well.The etch back process results in the formation of insulating spacers 256to isolate the gates 240, 242 of the vertical transistors 250, 252. Theinsulating layer, and consequently, the insulating spacers 256, can beformed from a silicon oxide material, or other material, that isselective to a silicon nitride etch process.

FIG. 8 is a simplified cross-sectional view of the structure shown inFIG. 7 at a later point in processing, in accordance with an embodimentof the present invention. An etch process is used to remove the siliconnitride sacrificial structures 208 a-c to leave the epitaxial posts 220,222, the vertical transistors 250, 252, and the insulating spacers 256.An insulating material is then deposited over the remaining structureand anisotropically etched back to form sidewalls 260 that isolate thegates 240, 242 of the vertical transistors 250, 252, respectively. Asshown in FIG. 2B, a dielectric interlayer 264 is subsequently depositedover the existing structure and etched back to form a planar surface onwhich digit lines and storage capacitors can be formed. Still withreference to FIG. 2B, a via 270 is formed through the dielectricinterlayer 264 to expose a portion the active area 206. A conductivematerial 272 is subsequently deposited over the structure and in the via270 to electrically contact the active area 206. The conductive material272 is masked and etched to form a digit line contact.

FIG. 9 is a simplified cross-sectional view of the structure shown inFIG. 2B at a later point in processing, in accordance with an embodimentof the present invention. A second dielectric interlayer 274 isdeposited over the structure and, using conventional methods, containershaped memory cell capacitors 280 are formed in the second dielectricinterlayer 274 and have a first capacitor plate 282 electrically coupledto a respective epitaxial post 220, 222. The first capacitor plate 282can be formed from a highly doped polysilicon material; however, it willbe appreciated that other suitable materials may be used as well.Following the formation of the first capacitor plates 282 of the memorycell capacitors 280, dopants from the highly doped polysilicon layer arediffused into the respective epitaxial post 220, 222 by heating thesubstrate 204. As a result, lightly doped conductive regions 284 arecreated in the epitaxial posts 220, 222 in a region adjacent theinsulating spacers 256. The lightly doped conductive regions 284 providea conductive path between a memory cell capacitor 280 and the respectivegate 240, 242 of the vertical transistors 250, 252. Thus, when avertical transistor is activated, the memory cell capacitor 280 can beelectrically coupled to the active area 206.

Although embodiments of the present invention have been described asincluding container shaped memory cell capacitors 280, it will beappreciated that alternative capacitor structures may also be used aswell without departing from the scope of the present invention. Forexample, conventional stacked capacitor structures electrically coupledto the epitaxial posts 220, 222 may be used in an alternative embodimentof the present invention. Alternatively, capacitors having a firstcapacitor plate with multiple polysilicon layers, that is, a “finned”capacitor, may also be used. Moreover, other modifications may be madeto the memory cell capacitors 280 as well and still remain within thescope of the present invention. An example of such a modificationincludes forming memory cell capacitors 280 having a rough surface suchas a hemispherical silicon grain (HSG) layer (not shown). Consequently,the present invention is not limited to the specific embodimentsdescribed herein.

FIG. 10 is a top plan view of an array of memory cells 300, according toan embodiment of the present invention. As shown in FIG. 10, capacitorshave not been illustrated in order to avoid unnecessarily obscuring theother features of the array of memory cells 300. In the presentillustration, the respective array of memory cells 300 is illustrated asincluding word lines 302, 304 for selecting a specific row of memorycells. The corresponding word lines are electrically coupled to therespective gate areas of the corresponding pass or access gate of thevertical memory cell, in accordance with the fabrication of the verticalmemory cells described herein. Furthermore, the array of memory cells300, illustrated with respect to the embodiment of FIG. 10, furtherincludes buried digit lines 306, 308 implemented generally orthogonal toword lines 302, 304. Formation of the buried digit lines 306, 308 iswell known in the art and can be formed using conventional processingmethods.

FIG. 11 is a simplified cross-sectional view of an array of memory cells300 (FIG. 10) along A-A illustrating only a subset of the correspondinglayers previously discussed with reference to the fabrication of avertical transistor. For clarity, cross-sectional view A-A illustratesthe vertical transistor having depletion regions 310, 312 about a pairof epitaxial posts (FIG. 10). Transistor depletion regions arerespectively surrounded by the corresponding word lines 302, 304illustrated as extending in a Z-direction with respect to theillustration of FIG. 11. FIG. 11 further illustrates respective firstportions of active areas 314, 316 located below the correspondingtransistor depletion regions 310, 312. Active areas 314, 316 provide acontact point for coupling to a digit line for coupling the chargestored within the corresponding capacitors.

FIG. 12 is a cross-sectional view of the array of memory cells 300 (FIG.10) along B-B of FIG. 10. FIG. 12 illustrates the coupling of burieddigit lines 306, 308 with second portions of active areas 318, 320. Asillustrated, buried digit lines 306, 308 couple with active areas 318,320 using a sloped interconnection.

FIG. 13 is a top plan view of an array of memory cells 400 according toan embodiment of the present invention. As shown in FIG. 13, capacitorshave not been illustrated in order to avoid unnecessarily obscuring theother structures of the array of memory cells 400. Array of memory cells400 includes one or more epitaxial posts which are used for forming anaccess or vertical transistor. The transistors, when activated, formtransistor depletion regions 402, 404. The array of memory cells 400 isformed within discrete active areas 330 which are arranged in a diagonalconfiguration with respect to word lines 322, 324 and buried digit lines326, 328.

FIG. 14 is a simplified cross-sectional view of a memory cell of thearray of memory cells 400 (FIG. 13) along A-A of FIG. 13. Asillustrated, word line 324 extends in a horizontal direction, asillustrated, causing the vertical transistors to form transistordepletion regions 402, 404 over first portion of active areas 330.

In order to complete the operation of the memory cell by providing anelectrical path for the flow of charge from the capacitor to a burieddigit line 326 when a transistor depletion region 402 is formed throughthe activation of word line 324, buried digit line 326 must beelectrically coupled at a second portion of the discrete active area330. FIG. 15 is a simplified cross-sectional view of a memory cell alongB-B of FIG. 13. Due to the diagonally formed discrete active area 330,buried digit line 326 may vertically couple with the second portion ofthe discrete active area 330 using a vertical contact which is incontrast to the sloped buried digit line contact of FIG. 12. Those ofordinary skill in the art appreciate that the formation of a verticalcontact is easier to print and form than a sloped contact, an example ofwhich is illustrated with reference to FIG. 12. One example of theformation of discrete active areas includes the formation of discreteactive areas utilizing a shallow trench isolation (STI) technique, thespecifics of which are known and appreciated by those of ordinary skillin the art.

FIG. 16 is a top plan view of an array of memory cells 500, according toan embodiment of the present invention. As shown in FIG. 16, capacitorshave not been illustrated in order to avoid unnecessarily obscuring theother structures of the array of memory cells 500. Array of memory cells500 includes one or more epitaxial posts which are used for forming anaccess or vertical transistor. The transistors, when activated, formtransistor depletion regions 502-506. The array of memory cells 500 isformed within a continuous active area 530 which is arranged in agenerally serpentine configuration with respect to word lines 522-526.

A buried digit line 528 is also configured in a serpentine arrangementwith both buried digit line 528 and active area 530 having topologicallyoverlapping regions. Furthermore, buried digit line 528 and active area530 are configured in a generally orthogonal relationship with wordlines 522-526. In the present embodiment, buried digit line 528 andactive area 530 topologically overlap, as illustrated in across-sectional arrangement as shown at B-B, by a width approximatelygreater than the individual width of one or more of the buried digitline 528 and active area 530.

FIG. 17 is a simplified cross-sectional view of a memory cell of thearray of memory cells 500 (FIG. 16) along A-A of FIG. 16. Asillustrated, word line 524 extends in a horizontal direction, asillustrated, causing the vertical transistors to form transistordepletion region 504 over a first portion of active area 530. Asillustrated, buried digit line 528 and a first portion of active area530 along A-A of FIG. 16 do not overlap and therefore does notaccommodate the formation of a vertical contact between buried digitline 528 and active area 530.

In order to complete the operation of the memory cell by providing anelectrical path for the flow of charge from the capacitor to burieddigit line 528 when a transistor depletion region 504 is formed throughthe activation of word line 524, buried digit line 528 must beelectrically coupled at a second portion of the discrete active area530. FIG. 18 is a simplified cross-sectional view of a memory cell fromthe array of memory cells along B-B of FIG. 16. Due to the overlappingserpentine configuration of buried digit line 528 with respect to activearea 530, buried digit line 528 may vertically couple with the secondportion of the discrete active area 530 using a vertical contact which,as appreciated by those of ordinary skill in the art, is more accuratelyfabricated by existing manufacturing processes. Furthermore, asillustrated with respect to the embodiment of FIG. 16, the width of thecontact formed between buried digit line 528 and active area 530 isapproximately greater than the entire width of one or more of the burieddigit line 528 and active area 530. Such an overlap may be commonlyreferred to as a “half-weave” signifying the overlapping nature of theserpentine arrangements of buried digit line 528 and active area 530.

FIG. 19 is a top plan view of an array of memory cells 600, according toan embodiment of the present invention. As shown in FIG. 19, capacitorshave not been illustrated in order to avoid unnecessarily obscuring theother structures of the array of memory cells 600. Array of memory cells600 includes one or more epitaxial posts which are used for forming anaccess or vertical transistor. The transistors, when activated, formtransistor depletion regions 602-606. The array of memory cells 600 isformed within a continuous active area 630 which is arranged in agenerally serpentine configuration with respect to word lines 622-626.

A buried digit line 628 is also configured in a serpentine arrangementwith both buried digit line 628 and active area 630 having topologicallyoverlapping regions. Furthermore, buried digit line 628 and active area630 are configured in a generally orthogonal relationship with wordlines 622-626. In the present embodiment, buried digit line 628 andactive area 630 topologically overlap, as illustrated for approximatelythe entire width of one or more of the buried digit line 628 and activearea 630 dimensions.

FIG. 20 is a simplified cross-sectional view of a memory cell of thearray of memory cells 600 (FIG. 19) along A-A of FIG. 19. Asillustrated, word line 624 extends in a horizontal direction, asillustrated, causing the vertical transistor to form transistordepletion region 604 over a first portion of active area 630. Asillustrated, buried digit line 628 and a first portion of active area630 along A-A of FIG. 19 do not overlap and therefore do not accommodatethe formation of a vertical contact between buried digit line 628 andactive area 630.

In order to complete the operation of the memory cell by providing anelectrical path for the flow of charge from the capacitor to burieddigit line 628 when a transistor depletion region 604 is formed throughthe activation of word line 624, buried digit line 628 must beelectrically coupled at a second portion of the continuous active area630. FIG. 21 is a simplified cross-sectional view of a memory cell fromthe array of memory cells along B-B of FIG. 19. Due to the overlappingserpentine configuration of buried digit line 628 with respect to activearea 630, buried digit line 628 may vertically couple with the secondportion of the continuous active area 630 using a vertical contactwhich, as appreciated by those of ordinary skill in the art, is moreaccurately fabricated by existing manufacturing processes. Furthermore,as illustrated with respect to the embodiment of FIG. 19, the width ofthe contact formed between buried digit line 628 and active area 630 isapproximately equal to the entire width of one or more of the burieddigit line 628 and active area 630. Such an overlap may be commonlyreferred to as a “quarter-weave” signifying the overlapping nature ofthe serpentine arrangements of buried digit line 628 and active area630.

FIG. 22 is a top plan view of an array of memory cells 700, according toan embodiment of the present invention. As shown in FIG. 22, capacitorshave not been illustrated in order to avoid unnecessarily obscuring theother structures of the array of memory cells 700. Array of memory cells700 includes one or more epitaxial posts which are used for forming anaccess or vertical transistor. The transistors, when activated, formtransistor depletion regions 702-706. The array of memory cells 700 isformed within a continuous active area 730 which is arranged in agenerally serpentine configuration with respect to word lines 722-726.

A buried digit line 728 is also configured in a serpentine arrangementwith both buried digit line 728 and active area 730 having topologicallyoverlapping regions. Furthermore, buried digit line 728 and active area730 are configured in a generally orthogonal relationship with wordlines 722-726. In the present embodiment, buried digit line 728 andactive area 730 topologically overlap as illustrated for less than theentire approximate width of one or more of the buried digit line 728 andactive area 730 dimensions.

FIG. 23 is a simplified cross-sectional view of a memory cell of thearray of memory cells 700 (FIG. 22) along A-A of FIG. 22. Asillustrated, word line 724 extends in a horizontal direction, asillustrated, causing the vertical transistor to form a transistordepletion region 704 over a first portion of active area 730. Asillustrated, buried digit line 728 and a first portion of active area730 along A-A of FIG. 22 do not overlap and therefore does notaccommodate the formation of a vertical contact between the buried digitline 728 and active area 730.

In order to complete the operation of the memory cell by providing anelectrical path for flow of a charge from the capacitor to buried digitline 728 when a transistor depletion region 704 is formed through theactivation of word line 724, buried digit line 728 must be electricallycoupled at a second portion of the discrete active area 730. FIG. 24 isa simplified cross-sectional view of a memory cell from the array ofmemory cells along B-B of FIG. 22. Due to the overlapping serpentineconfiguration of buried digit line 728 with respect to active area 730,buried digit line 728 may vertically couple with the second portion ofthe discrete active area 730 using a vertical contact which, asappreciated by those of ordinary skill in the art, is more accuratelyfabricated by existing manufacturing processes. Furthermore, asillustrated with respect to the embodiment of FIG. 22, the width of thecontact formed between buried digit line 728 and active area 730 isapproximately less than the entire width of one or more of the burieddigit line 728 and active area 730. Such an overlap may be commonlyreferred to as a “sub-quarter weave” signifying the overlapping natureof the serpentine arrangements of buried digit line 728 and active area730.

FIG. 25 is a functional block diagram of one embodiment of a memorydevice 60, which includes memory banks 62 a and 62 b. These memory bankseach incorporate a memory array including memory cells according to anembodiment of the present invention. In one embodiment, the memorydevice 60 is a synchronous DRAM (SDRAM), although it may be another typeof memory in other embodiments.

The memory device 60 includes an address register 64, which receives anaddress from an ADDRESS bus. A control logic circuit 66 (i) receives aclock (CLK) signal; (ii) receives clock enable (CKIE), chip select (CS),row address strobe (RAS), column address strobe (CAS), and write enable(WE) signals from the COMMAND bus, and (iii) communicates with the othercircuits of the memory device 60. A row-address multiplexer 68 receivesthe address signal from the address register 64 and provides the rowaddress to the row-address latch-and-decode circuits 70 a and 70 b forthe memory bank 62 a or the memory bank 62 b, respectively. During readand write cycles, the row-address latch-and-decode circuits 70 a and 70b activate the word lines of the addressed rows of memory cells in thememory banks 62 a and 62 b, respectively. Read/write circuits 72 a and72 b read data from the addressed memory cells in the memory banks 62 aand 62 b, respectively, during a read cycle, and write data to theaddressed memory cells during a write cycle. A column-addresslatch-and-decode circuit 74 receives the address from the addressregister 64 and provides the column address of the selected memory cellsto the read/write circuits 72 a and 72 b. For clarity, the addressregister 64, the row-address multiplexer 68, the row-addresslatch-and-decode circuits 70 a and 70 b, and the column-addresslatch-and-decode circuit 74 can be collectively referred to as anaddress decoder.

A data input/output (I/O) circuit 76 includes a plurality of inputbuffers 78. During a write cycle, the buffers 78 receive and store datafrom the DATA bus, and the read/write circuits 72 a and 72 b provide thestored data to the memory banks 62 a and 62 b, respectively. The dataI/O circuit 76 also includes a plurality of output drivers 80. During aread cycle, the read/write circuits 72 a and 72 b provide data from thememory banks 62 a and 62 b, respectively, to the drivers 80, which inturn provide this data to the DATA bus.

A refresh counter 82 stores the address of the row of memory cells to berefreshed either during a conventional auto-refresh mode or self-refreshmode. After the row is refreshed, a refresh controller 84 updates theaddress in the refresh counter 82, typically by incrementing ordecrementing, the contents of the refresh counter 82 by one. Althoughshown separately, the refresh controller 84 may be part of the controllogic circuit 66 in other embodiments of the memory device 60. Thememory device 60 may also include an optional charge pump 86, whichsteps up the power-supply voltage V_(DD) to a voltage V_(DDP). In oneembodiment, the charge pump 86 generates V_(DDP) approximately 1-1.5 Vhigher than V_(DD). The memory device 60 may also use V_(DDP) toconventionally overdrive selected internal transistors.

FIG. 26 is a block diagram of an electronic system 1212, such as acomputer system, that incorporates the memory device 60 of FIG. 25. Thesystem 1212 also includes computer circuitry 1214 for performingcomputer functions, such as executing software to perform desiredcalculations and tasks. The circuitry 1214 typically includes aprocessor 1216 and the memory device 60, which is coupled to theprocessor 1216. One or more input devices 1218, such as a keyboard or amouse, are coupled to the computer circuitry 1214 and allow an operator(not shown) to manually input data thereto. One or more output devices1220 are coupled to the computer circuitry 1214 to provide to theoperator data generated by the computer circuitry 1214. Examples of suchoutput devices 1220 include a printer and a video display unit. One ormore data storage devices 1222 are coupled to the computer circuitry1214 to store data on or retrieve data from external storage media (notshown). Examples of the storage devices 1222 and the correspondingstorage media include drives that accept hard and floppy disks, tapecassettes, and compact disk read-only memories (CD-ROMs). Typically, thecomputer circuitry 1214 includes address data and command buses and aclock line that is respectively coupled to the ADDRESS, DATA, andCOMMAND buses, and the CLK line of the memory device 60.

From the foregoing it will be appreciated that, although specificembodiments of the invention have been described herein for purposes ofillustration, various modifications may be made without deviating fromthe spirit and scope of the invention. For example, the memory cell hasbeen illustrated as having epitaxial posts with a rectangular orquadrilateral cross-sectional area. However, the epitaxial posts can beformed having a generally circular cross-sectional area or a generallypolygonal cross-sectional area as well. Accordingly, the invention isnot limited except as by the appended claims.

1. A DRAM cell formed on a surface of a semiconductor substrate,comprising: an active area formed in the substrate; a verticallyoriented access transistor including a first end disposed over a firstportion of the active area; a capacitor formed on and electricallycoupled to a second end of the vertically oriented access transistor;and a buried digit line electrically coupled in a vertically orientedcontact to a second portion of the active area.
 2. The DRAM cell ofclaim 1, wherein the active area is a discrete active area isolated fromother discrete active areas.
 3. The DRAM cell of claim 2, wherein thediscrete active area is oriented in a nonorthogonal orientation with theburied digit line.
 4. The DRAM cell of claim 3, wherein the secondportion of the active area corresponds to an intersection of the burieddigit line and the discrete active area.
 5. The DRAM cell of claim 1,wherein: the active area is configured in a continuous serpentinearrangement around the DRAM cell; and the buried digit line isconfigured in a continuous serpentine arrangement at least partiallyoverlapping the active area.
 6. The DRAM cell of claim 5, wherein theburied digit line is configured in a serpentine arrangement mirroringthe serpentine arrangement of the active area.
 7. The DRAM cell of claim6, wherein the serpentine arrangement of the buried digit line and theserpentine arrangement of the active area form a half-weave overlappingarrangement.
 8. The DRAM cell of claim 6, wherein the serpentinearrangement of the buried digit line and the serpentine arrangement ofthe active area form a quarter-weave overlapping arrangement.
 9. TheDRAM cell of claim 6, wherein the serpentine arrangement of the burieddigit line and the serpentine arrangement of the active area form asubquarter-weave overlapping arrangement.
 10. A memory cell formed on asubstrate, comprising: an active area formed in the substrate; avertical transistor including a first end disposed over a first portionof the active area, the vertical transistor formed in an epitaxial postformed on a surface of the substrate and extending from the surface ofthe substrate, the vertical transistor further having a gate formedaround a perimeter of the epitaxial post; a capacitor formed on thevertical transistor; and a buried digit line vertically electricallycoupled to a second portion of the active area.
 11. The memory cell ofclaim 10, wherein the buried digit line and the second portion of theactive area topologically overlap at an intersection adjacent to thevertical transistor.
 12. The memory cell of claim 10, wherein the activearea is a discrete active area isolated from other discrete activeareas.
 13. The memory cell of claim 12, wherein the discrete active areaand the buried digit line are configured in respective continuousserpentine arrangements at least partially topologically overlapping todefine the second portion of the active area.
 14. The memory cell ofclaim 13, wherein the second portion of the active area is defined by anapproximate entire overlap of the continuous active area and the burieddigit line.
 15. The memory cell of claim 13, wherein the second portionof the active area is defined by less than an entire overlap of thecontinuous active area and the buried digit line.
 16. A memory arrayformed on a substrate, comprising: at least one active area formed inthe substrate; and a plurality of memory cells formed in at least oneactive area, each of the plurality of memory cells including: avertically oriented access transistor including a first end disposedover a first portion of the at least one active area; a capacitor formedon and electrically coupled to a second end of the vertically orientedaccess transistor; and a buried digit line electrically coupled in avertically oriented contact to a second portion of the at least oneactive area.
 17. The memory array of claim 16, wherein the at least oneactive area is a discrete active area isolated from any other discreteactive areas.
 18. The memory array of claim 17, wherein the continuousactive area is oriented in a nonorthogonal orientation with the burieddigit line.
 19. The memory array of claim 18, wherein the second portionof the at least one active area corresponds to an intersection of theburied digit line and the continuous active area.
 20. The memory arrayof claim 16, wherein: the at least one active area is configured in aserpentine arrangement around the plurality of memory cells; and theburied digit line is configured in a serpentine arrangement at leastpartially overlapping the at least one active area.
 21. The memory arrayof claim 20, wherein the second portion of the at least one active areais defined by an approximate entire overlap of the continuous activearea and the buried digit line.
 22. The memory array of claim 20,wherein the second portion of the at least one active area is defined byless than an entire overlap of the continuous active area and the burieddigit line.
 23. A memory device, comprising: an array of memory cellsformed on a substrate, the memory cells of the array arranged in rowsand columns, each of the rows having a word line; row and column addresscircuitry coupled to the array of memory cells and responsive to anaddress bus, the circuitry configured to access specific ones of thearray of memory cells; and each of the memory cells of the arrayincluding: an active area formed in the substrate; a vertically orientedaccess transistor including a first end disposed over a first portion ofthe active area; a capacitor formed on and electrically coupled to asecond end of the vertically oriented access transistor; and a burieddigit line electrically coupled in a vertically oriented contact to asecond portion of the active area.
 24. The memory device of claim 23,wherein active area is a continuous active area isolated from any othercontinuous active areas.
 25. The memory device of claim 24, wherein thediscrete active area is oriented in a nonorthogonal orientation with theburied digit line.
 26. The memory device of claim 25, wherein the secondportion of the active area corresponds to an intersection of the burieddigit line and the discrete active area.
 27. The memory device of claim23, wherein: the active area is configured in a continuous serpentinearrangement around the array of memory cells; and the buried digit lineis configured in a serpentine arrangement at least partially overlappingthe active area.
 28. The memory device of claim 27, wherein the secondportion of the active area is defined by an approximate entire overlapof the continuous active area and the buried digit line.
 29. The memorydevice of claim 27, wherein the second portion of the active area isdefined by less than an entire overlap of the continuous active area andthe buried digit line.
 30. An electronic system, comprising: a processorhaving a processor bus; an input device coupled to the processor throughthe processor bus and adapted to allow data to be entered into theelectronic system; an output device coupled to the processor through theprocessor bus and adapted to allow data to be output from the electronicsystem; and a memory device coupled to the processor through theprocessor bus, the memory device comprising: a memory array formed on asubstrate, comprising: at least one active area formed in the substrate;and a plurality of memory cells formed in the at least one active area,each of the plurality of memory cells including: a vertically orientedaccess transistor including a first end disposed over a first portion ofthe at least one active area; a capacitor formed on and electricallycoupled to a second end of the vertically oriented access transistor;and a buried digit line electrically coupled in a vertically orientedcontact to a second portion of the at least one active area.
 31. Theelectronic system of claim 30, wherein the at least one active area is acontinuous active area isolated from any other discrete active areas.32. The electronic system of claim 31, wherein the continuous activearea is oriented in a nonorthogonal orientation with the buried digitline.
 33. The electronic system of claim 32, wherein the second portionof the at least one active area corresponds to an intersection of theburied digit line and the continuous active area.
 34. The electronicsystem of claim 30, wherein: the at least one active area is configuredin a serpentine arrangement around the plurality of memory cells; andthe buried digit line is configured in a serpentine arrangement at leastpartially overlapping the at least one active area.
 35. The electronicsystem of claim 34, wherein the second portion of the at least oneactive area is defined by an approximate entire overlap of thecontinuous active area and the buried digit line.
 36. The electronicsystem of claim 34, wherein the second portion of the at least oneactive area is defined by less than an entire overlap of the continuousactive area and the buried digit line.
 37. A method of forming a memorycell on a surface of a substrate, comprising: forming at least oneactive area in the substrate; and forming a vertically oriented accesstransistor including a first end disposed over a first portion of the atleast one active area; forming a buried digit line electrically coupledin a vertically oriented contact to a second portion of the at least oneactive area; and forming a capacitor electrically coupled to a secondend of the vertically oriented access transistor.
 38. The method ofclaim 37, wherein forming the at least one active area in the substratecomprises forming at least one discrete active area isolated from anyother discrete active areas.
 39. The method of claim 38, wherein formingat least one discrete active area further comprises forming at least onediscrete active area oriented in a nonorthogonal orientation with theburied digit line.
 40. The method of claim 37, further comprising:forming the at least one active area in a serpentine arrangement aroundthe memory cell; and forming the buried digit line in a serpentinearrangement at least partially overlapping the at least one active area.41. The method of claim 40, further comprising approximately entirelyoverlapping the at least one active area and the buried digit line atthe second portion of the at least one active area.
 42. The method ofclaim 40, further comprising approximately less than entirelyoverlapping the at least one active area and the buried digit line atthe second portion of the at least one active area.